luamml crashes on prime in \tag



 ~~~~
\DocumentMetadata{lang=en,tagging=on,
tagging-setup={math/setup=mathml-SE}}
\documentclass{article}
%\usepackage{unicode-math}
\begin{document}


\begin{align*}
blub\tag{\theequation$'$}
\end{align*}

\end{document}
~~~~

errors with 

warning  (nodes): node 100280 has an attribute list that is free already, case 1

(example extracted from testmath.tex)