-
Notifications
You must be signed in to change notification settings - Fork 73
Commit
This commit does not belong to any branch on this repository, and may belong to a fork outside of the repository.
Support multi-face layouts and rectangular chips in masks
This commit adds new features to mask layout generation: - Make it easier to create mask layouts for multiple faces on the same wafer - Make it possible to use rectangular (non-square) chips - New mask demo_multiface.py to demonstrate these features
- Loading branch information
1 parent
e35b22f
commit a767105
Showing
7 changed files
with
316 additions
and
73 deletions.
There are no files selected for viewing
This file contains bidirectional Unicode text that may be interpreted or compiled differently than what appears below. To review, open the file in an editor that reveals hidden Unicode characters.
Learn more about bidirectional Unicode characters
This file contains bidirectional Unicode text that may be interpreted or compiled differently than what appears below. To review, open the file in an editor that reveals hidden Unicode characters.
Learn more about bidirectional Unicode characters
Large diffs are not rendered by default.
Oops, something went wrong.
This file contains bidirectional Unicode text that may be interpreted or compiled differently than what appears below. To review, open the file in an editor that reveals hidden Unicode characters.
Learn more about bidirectional Unicode characters
75 changes: 75 additions & 0 deletions
75
klayout_package/python/kqcircuits/masks/multi_face_mask_layout.py
This file contains bidirectional Unicode text that may be interpreted or compiled differently than what appears below. To review, open the file in an editor that reveals hidden Unicode characters.
Learn more about bidirectional Unicode characters
| Original file line number | Diff line number | Diff line change |
|---|---|---|
| @@ -0,0 +1,75 @@ | ||
| # This code is part of KQCircuits | ||
| # Copyright (C) 2023 IQM Finland Oy | ||
| # | ||
| # This program is free software: you can redistribute it and/or modify it under the terms of the GNU General Public | ||
| # License as published by the Free Software Foundation, either version 3 of the License, or (at your option) any later | ||
| # version. | ||
| # | ||
| # This program is distributed in the hope that it will be useful, but WITHOUT ANY WARRANTY; without even the implied | ||
| # warranty of MERCHANTABILITY or FITNESS FOR A PARTICULAR PURPOSE. See the GNU General Public License for more details. | ||
| # | ||
| # You should have received a copy of the GNU General Public License along with this program. If not, see | ||
| # https://www.gnu.org/licenses/gpl-3.0.html. | ||
| # | ||
| # The software distribution should follow IQM trademark policy for open-source software | ||
| # (meetiqm.com/developers/osstmpolicy). IQM welcomes contributions to the code. Please see our contribution agreements | ||
| # for individuals (meetiqm.com/developers/clas/individual) and organizations (meetiqm.com/developers/clas/organization). | ||
| from kqcircuits.masks.mask_layout import MaskLayout | ||
|
|
||
|
|
||
| class MultiFaceMaskLayout: | ||
| """Class representing multiple mask layouts, corresponding to multiple faces on the same wafer. | ||
| This is a helper class to create multiple ``MaskLayout`` instances, one for each face, and set the same properties | ||
| and chips map for each, and a container for the created mask layouts. It also provides `add_chips_map` that | ||
| distributes over each containing `MaskLayout.add_chips_map`. | ||
| The usual way to instantiate ``MultiFaceMaskLayout`` is through ``MaskSet.add_multi_face_mask_layout``. | ||
| Attributes: | ||
| face_ids: List of face ids to include in this mask layout | ||
| mask_layouts: Dictionary of {face_id: mask_layout} of the individual ``MaskLayouts`` contained in this class | ||
| """ | ||
| def __init__(self, layout, name, version, with_grid, face_ids, chips_map=None, extra_face_params=None, | ||
| mask_layout_type=MaskLayout, **kwargs): | ||
| """Create a multi face mask layout, which can be used to make masks with matching chip maps on multiple faces. | ||
| A ``MaskLayout`` is created of each face in ``face_ids``. If ``face_ids`` is a list, the individual mask layouts | ||
| all have identical parameters. To specify some parameters differently for each mask layout, supply ``face_ids`` | ||
| as a dictionary ``{face_ids: extra_params}``, where ``extra_params`` is a dictionary of arguments passed only | ||
| to the mask layout for that face id. These override ``kwargs`` if they contain the same keys. | ||
| By default, ``bbox_face_ids`` is set to ``list(face_ids)`` for all mask layouts. | ||
| Args: | ||
| layout: Layout to use | ||
| name: name of the mask | ||
| version: version of the mask | ||
| with_grid: if True, ground grids are generated | ||
| face_ids: either a list of face ids to include, or a dictionary of ``{face_id: extra_params}``, where | ||
| ``extra_params`` is a dictionary of keyword arguments to apply only to this mask layout. | ||
| chips_map: Chips map to use, or None to use an empty chips map. | ||
| mask_layout_type: optional subclass of MaskLayout to use | ||
| kwargs: any keyword arguments are passed to all containing mask layouts. | ||
| """ | ||
| self.face_ids = face_ids | ||
| self.mask_layouts = {} | ||
|
|
||
| for face_id in face_ids: | ||
| all_kwargs = {'bbox_face_ids': self.face_ids} | ||
| all_kwargs.update(kwargs) | ||
| if extra_face_params is not None and face_id in extra_face_params: | ||
| all_kwargs.update(**extra_face_params[face_id]) | ||
| self.mask_layouts[face_id]: MaskLayout = mask_layout_type( | ||
| layout=layout, | ||
| name=name, | ||
| version=version, | ||
| with_grid=with_grid, | ||
| face_id=face_id, | ||
| chips_map=chips_map if chips_map is not None else [[]], | ||
| **all_kwargs | ||
| ) | ||
|
|
||
| def add_chips_map(self, chips_map, **kwargs): | ||
| for face_id in self.face_ids: | ||
| self.mask_layouts[face_id].add_chips_map(chips_map, **kwargs) |
This file contains bidirectional Unicode text that may be interpreted or compiled differently than what appears below. To review, open the file in an editor that reveals hidden Unicode characters.
Learn more about bidirectional Unicode characters
This file contains bidirectional Unicode text that may be interpreted or compiled differently than what appears below. To review, open the file in an editor that reveals hidden Unicode characters.
Learn more about bidirectional Unicode characters
| Original file line number | Diff line number | Diff line change |
|---|---|---|
| @@ -0,0 +1,108 @@ | ||
| # This code is part of KQCircuits | ||
| # Copyright (C) 2021 IQM Finland Oy | ||
| # | ||
| # This program is free software: you can redistribute it and/or modify it under the terms of the GNU General Public | ||
| # License as published by the Free Software Foundation, either version 3 of the License, or (at your option) any later | ||
| # version. | ||
| # | ||
| # This program is distributed in the hope that it will be useful, but WITHOUT ANY WARRANTY; without even the implied | ||
| # warranty of MERCHANTABILITY or FITNESS FOR A PARTICULAR PURPOSE. See the GNU General Public License for more details. | ||
| # | ||
| # You should have received a copy of the GNU General Public License along with this program. If not, see | ||
| # https://www.gnu.org/licenses/gpl-3.0.html. | ||
| # | ||
| # The software distribution should follow IQM trademark policy for open-source software | ||
| # (meetiqm.com/developers/osstmpolicy). IQM welcomes contributions to the code. Please see our contribution agreements | ||
| # for individuals (meetiqm.com/developers/clas/individual) and organizations (meetiqm.com/developers/clas/organization). | ||
|
|
||
| """ | ||
| This mask layout demonstrates using multiple faces on a single wafer. As example, we use `1t1` as the top face, and | ||
| `1b1` as the bottom face of the wafer. We draw some example chips with metalization on both faces, and TSVs to connect | ||
| them together. | ||
| A separate MaskLayout is generated for each face, which means that things like markers can be customized on each side | ||
| of the wafer if needed. However, it is important that the chips on both sides line up exactly. The method | ||
| `MaskSet.add_multi_face_mask_layout` helps with this: it creates identical mask layouts for multiple faces, except for | ||
| any differences per face that are specified explicitly. | ||
| To generate this example, run `kqc mask demo_multiface.py` in the command line. | ||
| In this example, we use the convention that in the full mask files (`DemoMF_v1_1b1.oas` and `DemoMF_v1_1t1.oas`), all | ||
| shapes are seen from the top, so looking at `1t1` and seeing `1b1` "through the wafer". Hence, `1t1` is drawn with text | ||
| readable normally, and `1b1` with text mirrored. One can verify the combined mask of both side by opening both of these | ||
| `oas` files in KLayout in the same panel. | ||
| To draw the mirrored texts in `1b1`, we set `mirror_labels=True` for the mask layout, and also set | ||
| `frames_mirrored[1]=True` for each chip, where 1 is the chip frame index of `1b1` in our case. | ||
| For fabrication, usually the photomasks will have to be mirrored for the `1b1` face, such that they are again normal | ||
| when looking at the wafer from the bottom. In this script, the mirroring is done for all `1b1` mask exports, using the | ||
| `^` prefix in `mask_export_layers`. You can verify this by opening `DemoMF_v1-1b1-1b1_base_metal_gap.oas` for example, | ||
| here the texts are normally readable again. | ||
| This example also shows adding multiple sizes of chips to the same mask layout, and using rectangular vs square chips. | ||
| """ | ||
|
|
||
| from kqcircuits.chips.chip import Chip | ||
| from kqcircuits.chips.sample_holder_test import SampleHolderTest | ||
| from kqcircuits.defaults import default_marker_type | ||
| from kqcircuits.masks.mask_set import MaskSet | ||
| from kqcircuits.pya_resolver import pya | ||
|
|
||
| mask_set = MaskSet(name="DemoMF", version=1, with_grid=False) | ||
|
|
||
| # Create a multi-face mask layout with regular chip maps (default size 10x10mm) | ||
| wafer_1 = mask_set.add_multi_face_mask_layout( | ||
| chips_map=[ | ||
| ["CH1"] * 15 | ||
| ] * 7, | ||
| face_ids=['1t1', '1b1'], | ||
| extra_face_params={ | ||
| '1t1': { | ||
| "layers_to_mask": {"base_metal_gap": "1", "through_silicon_via": "2"}, | ||
| "mask_export_layers": ["base_metal_gap", "through_silicon_via"] | ||
| }, | ||
| '1b1': { | ||
| "mirror_labels": True, # Mask label and chip copy labels are mirrored on the bottom side of the wafer | ||
| "layers_to_mask": {"base_metal_gap": "1", "through_silicon_via": "2"}, | ||
| "mask_export_layers": ["^base_metal_gap", "^through_silicon_via"] # Mirror individual output files | ||
| }, | ||
| } | ||
| ) | ||
|
|
||
| # Add 20x10mm chips on part of the chip | ||
| wafer_1.add_chips_map( | ||
| [ | ||
| ["ST1"] * 6, | ||
| ] * 7, | ||
| align_to=(-65000, 5000), # Top-left corner of the chip map | ||
| chip_size=(20000, 10000), # (width, height) of the ST1 chip | ||
| ) | ||
|
|
||
| # Chip parameters for an empty multi-face chip that uses `1t1` and `1b1` | ||
| multi_face_parameters = { | ||
| "face_ids": ['1t1', '2b1', '1b1', '2t1'], | ||
| "frames_enabled": [0, 2], | ||
| "frames_marker_dist": [1500, 1500], | ||
| "frames_mirrored": [False, True], | ||
| "frames_dice_width": [200, 200], | ||
| "face_boxes": [None] * 4, # Same size on all faces | ||
| "with_gnd_tsvs": True, | ||
| "marker_types": [default_marker_type]*8 | ||
| } | ||
|
|
||
| # Chip parameters for a rectangular 20x10 mm chip. | ||
| # Note: only some chips in the KQC library support dynamic resizing, typically one would create a custom chip with | ||
| # the size and design needed. | ||
| rectangular_parametes = { | ||
| **multi_face_parameters, | ||
| "box": pya.DBox(0, 0, 20000, 10000), | ||
| } | ||
|
|
||
| mask_set.add_chip([ | ||
| (Chip, "CH1", multi_face_parameters), | ||
| (SampleHolderTest, "ST1", rectangular_parametes) | ||
| ]) | ||
|
|
||
| mask_set.build() | ||
| mask_set.export() |