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Aktoren-Antrieb mit piezoelektrische Duennschichten - ZnO/AlN, etc.

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Actuators

Aktoren-Antrieb

piezoelektrische Dünnschichten
piezo-electric ZnO, AlN thin-films, etc.

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Aktoren-Antrieb mit piezoelektrische Duennschichten - ZnO/AlN, etc.

actuators silicon piezoelectric zno thinfilm zinkoxid aktor aktuator

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