test.py

"""
Created on Wen Apr 27 2016
@author: WenLv (wenlv@hust.edu.cn)
"""
import time

from litho.lens import LensList
from litho.tcc import TCCList
from litho.mask import Mask
from litho.source import Source
from litho.ilt import RobustILT
from litho.config import PATH


def test_inverse_litho():
    m = Mask()
    m.x_gridsize = 2.5
    m.y_gridsize = 2.5

    gdspath = PATH.gdsdir / "NOR2_X2.gds"

    m.openGDS(gdspath, layername=11, boundary=0.3)
    m.maskfft()

    s = Source()
    s.na = 1.35
    s.maskxpitch = m.x_range[1] - m.x_range[0]
    s.maskypitch = m.y_range[1] - m.y_range[0]
    s.type = "annular"
    s.sigma_in = 0.7
    s.sigma_out = 0.9
    s.smooth_deta = 0.00
    s.shiftAngle = 0
    s.update()
    s.ifft()

    o = LensList()
    o.na = s.na
    o.maskxpitch = s.maskxpitch
    o.maskypitch = s.maskypitch
    o.focusList = [0]
    o.focusCoef = [1]
    o.calculate()

    tic = time.time()
    print("Calculating TCC and SVD kernels")
    t = TCCList(s, o)
    t.calculate()
    print("###taking %1.3f seconds" % (time.time() - tic))

    print("Calculating ILT")
    i = RobustILT(m, t)
    i.image.resist_a = 100
    i.image.resist_tRef = 0.9
    i.stepSize = 0.4
    i.image.doseList = [0.9, 1, 1.1]
    i.image.doseCoef = [0.3, 1, 0.3]
    i.run(1)


if __name__ == "__main__":
    test_inverse_litho()