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This project implements defect detection in semiconductor SEM images of flat, linear and patterned structures using Fast MCD method

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Defect-detection-using-Fast-MCD

🔍 Semiconductor Defect Detection using FAST-MCD

This project implements automated defect detection in semiconductor inspection images using a combination of:

  • FAST-MCD (Fast Minimum Covariance Determinant) for robust statistical outlier detection,
  • Image structure classification (linear, flat, patterned), and
  • Morphological post-processing

It reproduces and extends the approach described in

"Defect Inspection in Semiconductor Images Using FAST-MCD Method and Neural Network"
Lee, Kim et al., IEEE Access 2020.

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This project implements defect detection in semiconductor SEM images of flat, linear and patterned structures using Fast MCD method

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