- Fundamentals of MEMS = micro-electro-mechanical systems,
- Mikromechanik, Mikrotechnik, Mikrosystemtechnik (MST), microsystems,
- Halbleiter / Semiconductor,
- Silicon / Silicium,
- Quartz / Quarz,
- piezoelectric thin-film technology (ZnO, AlN)
-
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Mikromechanik, MEMS, Mikrosystemtechnik, MST, Halbleiter, Semiconductor, microsystems
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