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@article{Kortright1988,
title={Amorphous silicon carbide coatings for extreme ultraviolet optics.},
author={Jeffrey B Kortright and David L Windt},
journal={Applied optics},
year={1988},
volume={27 14},
pages={
2841-6
},
url={https://api.semanticscholar.org/CorpusID:39248487}
}
@article{VidalDasilva2010,
author = {Vidal-Dasilva, Manuela and Aquila, Andrew L. and Gullikson, Eric M. and Salmassi, Farhad and Larruquert, Juan I.},
title = "{Optical constants of magnetron-sputtered magnesium films in the 25–1300 eV energy range}",
journal = {Journal of Applied Physics},
volume = {108},
number = {6},
pages = {063517},
year = {2010},
month = {09},
abstract = "{The transmittance of dc magnetron-sputtered Mg thin films was measured in the 25–1300 eV spectral range. Freestanding Mg films protected with Al layers were characterized ex situ. Transmittance measurements were used to obtain the extinction coefficient k of Mg films. The obtained k values along with the data available in the literature, and with interpolations and extrapolations for the rest of the spectrum, were used to obtain the real part of the index of refraction n by the Kramers–Krönig analysis. Sum-rule tests indicated a good consistency of the data.}",
issn = {0021-8979},
doi = {10.1063/1.3481457},
url = {https://doi.org/10.1063/1.3481457},
eprint = {https://pubs.aip.org/aip/jap/article-pdf/doi/10.1063/1.3481457/13212872/063517\_1\_online.pdf},
}
@inproceedings{Rebellato2018,
author = {Jennifer Rebellato and Evgueni Meltchakov and Regina Soufli and S{\'e}bastien De Rossi and Xueyan Zhang and Fr{\'e}d{\'e}ric Auch{\`e}re and Franck Delmotte},
title = {{Analyses of tabulated optical constants for thin films in the EUV range and application to solar physics multilayer coatings}},
volume = {10691},
booktitle = {Advances in Optical Thin Films VI},
editor = {Michel Lequime and H. Angus Macleod and Detlev Ristau},
organization = {International Society for Optics and Photonics},
publisher = {SPIE},
pages = {106911U},
keywords = {optical constants, soft x-rays, extreme ultraviolet, EUV, multilayer coatings, solar physics, thin films, materials},
year = {2018},
doi = {10.1117/12.2313346},
URL = {https://doi.org/10.1117/12.2313346}
}
@article{Soufli2012,
author = {Soufli, Regina and Fernández-Perea, Mónica and Baker, Sherry L. and Robinson, Jeff C. and Alameda, Jennifer and Walton, Christopher C.},
title = "{Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings}",
journal = {Applied Physics Letters},
volume = {101},
number = {4},
pages = {043111},
year = {2012},
month = {07},
abstract = "{Magnesium/silicon carbide (Mg/SiC) has the potential to be the best-performing reflective multilayer coating in the 25–80 nm wavelength region but suffers from Mg-related corrosion, an insidious problem which completely degrades reflectance. We have elucidated the origins and mechanisms of corrosion propagation within Mg/SiC multilayers. Based on our findings, we have demonstrated an efficient and simple-to-implement corrosion barrier for Mg/SiC multilayers. The barrier consists of nanometer-scale Mg and Al layers that intermix spontaneously to form a partially amorphous Al-Mg layer and is shown to prevent atmospheric corrosion while maintaining the unique combination of favorable Mg/SiC reflective properties.}",
issn = {0003-6951},
doi = {10.1063/1.4737649},
url = {https://doi.org/10.1063/1.4737649},
eprint = {https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/1.4737649/14265083/043111\_1\_online.pdf},
}